Back to results
US 2017/0284879 A1Published application
Pressure sensor, altimeter, electronic device, and moving object
AssigneeSeiko Epson Corporation
InventorsJunichi TAKEUCHI, Yusuke MATSUZAWA, Shinichi YOTSUYA
Life of this patent
Estimating the term…
Abstract
A pressure sensor includes a substrate that has a diaphragm which bends and deforms by receiving pressure and a displacement regulating unit that regulates deformation of the diaphragm, in which the diaphragm and the displacement regulating unit are spaced away from each other in a first state where the diaphragm receives pressure within a measurable range, and the diaphragm and the displacement regulating unit come into contact with each other in a second state where the diaphragm receives pressure exceeding the measurable range.
Claims20
A pressure sensor comprising:
- a diaphragm that bends and deforms by receiving pressure;
- and
- a displacement regulating unit that regulates deformation of the diaphragm,
- wherein the diaphragm and the displacement regulating unit are spaced away from each other in a first state where the diaphragm receives pressure within a measurable range, and
- the diaphragm and the displacement regulating unit come into contact with each other in a second state where the diaphragm receives pressure exceeding the measurable range.
2 more elements
Dependencies are inferred from the claim text.