Shape measurement device and shape measurement method

A shape measurement method comprising:

• a distance measurement step of measuring a distance to a measurement object to be measured by first and second distance measurement units disposed so as to be opposed to each other with the measurement object therebetween;
• a displacement measurement step of measuring a displacement of each of the first and second distance measurement units in an opposition direction by first and second displacement measurement units, respectively;
• and
• a shape arithmetic operation step of obtaining, as a shape of the measurement object, a thickness of the measurement object along the opposition direction, the thickness being corrected with first and second displacement measurement results measured by the first and second displacement measurement units, respectively, at the displacement measurement step based on first and second distance measurement results measured by the first and second distance measurement units, respectively, at the distance measurement step.