Apparatus and Method to Control Properties of Fluid Discharge Via Refrigerative Exhaust
AssigneeVeeco Precision Surface Processing LLC
InventorsJohn Taddei, Laura Mauer, George Chiaverini, Jia Li
Life of this patent
Estimating the term…
Abstract
An apparatus and method for controlling fluid discharge temperature on a semiconductor manufacturing tool. In this technique, the temperature is controlled via the use of refrigerative exhaust. This embodiment includes the hardware and controls to perform and monitor the described operation.
Claims27
In a wet processing system having an exhaust line carrying exhaust gas and a heated fluid discharge outlet line carrying heated discharge fluid, an exhaust duct comprises:
- a housing having a hollow interior, wherein the housing has a first inlet for receiving a first fluid, a second inlet for receiving a second fluid, a first outlet for discharging the first fluid after it has traveled through the housing, and a second outlet for discharging the second fluid after it has traveled through the housing, wherein the housing has a first internal region at a first end of the housing, an intermediate region, and a second internal region at a second end of the housing, the intermediate region of the housing containing internals that define a plurality of flow paths within the intermediate region and increase a surface area over which the first fluid and second fluid flow and contact one another, wherein the first inlet and second outlet are located in the first internal region and the second inlet and first outlet are located in the second internal region.
A method for controlling fluid discharge temperature on a semiconductor manufacturing tool comprising the steps of:
- delivering a heated discharge fluid from the semiconductor manufacturing tool through a first inlet into an interior of an exhaust duct;
- delivering exhaust gas from the semiconductor manufacturing tool through a second inlet into the interior of the exhaust duct;
- cooling the heated discharge fluid by flowing the heated discharge fluid through internals disposed within the interior of the exhaust duct, the internals defining a plurality of flow paths in which the heated discharge fluid flows in a first direction and into contact with the exhaust gas which flows through the plurality of flow paths of the internals in a second direction such that the exhaust gas and heated discharge fluid are in contact with one another;
- discharging the cooled discharge fluid through a first outlet;
- and
- discharge the exhaust gas through a second outlet.
Dependencies are inferred from the claim text.