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US 2017/0284727 A1Published application
Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method
AssigneeEbara Corporation
InventorsKenichi Suzuki, Ryuichi Kosuge, Kenichiro Saito
Life of this patent
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Abstract
A substrate transport apparatus includes a substrate holding unit configured to hold a substrate; a casing; and a drive mechanism at least partially provided within the casing and configured to drive the substrate holding unit using air. The drive mechanism is capable of supplying air into the casing.
Claims9
A substrate transport apparatus comprising:
- a substrate holding unit configured to hold a substrate;
- a casing;
- and
- a drive mechanism at least partially provided within the casing and configured to drive the substrate holding unit using air,
- wherein the drive mechanism is capable of supplying air into the casing.
2 more elements
A method of suppressing an occurrence of dew condensation in a substrate transport apparatus, the method comprising:
- supplying air to a casing of the substrate transport apparatus.
A method of suppressing an occurrence of dew condensation in a substrate transport apparatus, the method comprising:
- providing the substrate transport apparatus including a substrate holding unit configured to hold a substrate, a casing, and a driving mechanism at least partially provided within the casing and configured to drive the substrate holding unit using air;
- supplying air for driving the substrate holding unit;
- and
- supplying the air to the casing of the substrate transport apparatus.
1 more element
Dependencies are inferred from the claim text.