Cryopump

A cryopump comprising:

• a cryocooler which includes a high-temperature cooling stage, a low-temperature cooling stage having an axial tip stage surface, and a cryocooler structure portion which extends in an axial direction from the high-temperature cooling stage to the low-temperature cooling stage;
• a radiation shield which is thermally coupled to the high-temperature cooling stage and includes a shield front end which defines a shield main opening and a shield bottom portion having a cryocooler insertion hole which receives the cryocooler structure portion such that the axial tip stage surface faces the shield main opening;
• a non-contact cap member which surrounds the axial tip stage surface in a non-contact manner and is thermally coupled to the high-temperature cooling stage;
• and
• a low-temperature cryopanel portion which is disposed between the cap member and the high-temperature cooling stage in the axial direction and is thermally coupled to the low-temperature cooling stage.