Pattern transfer device and pattern transfer method
OwnerYongfang LIinventor
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Abstract
According to one embodiment, a pattern transfer device includes a substrate, a transfer unit and a controller. The transfer unit is configured to have electrodes and transfer a pattern corresponding to the electrodes with a voltage applied between the substrate and the electrodes. The controller is configured to control humidity between the substrate and the transfer unit.
Claims14
A pattern transfer device comprising:
- a substrate;
- a transfer unit having electrodes, the transfer unit being configured to transfer a pattern corresponding to the electrodes with a voltage applied between the substrate and the electrodes;
- and
- a controller configured to control humidity between the substrate and the transfer unit.
A pattern transfer device comprising:
- a substrate;
- a transfer unit having electrodes, the transfer unit being configured to transfer a pattern of the electrodes;
- and
- a control chamber containing the substrate and the transfer unit, the control chamber being configured to control humidity, wherein
- the pattern of the electrodes is transferred onto the substrate with a voltage applied between the substrate and the electrodes.
A pattern transfer method employed in a pattern transfer device including a substrate, a transfer unit having electrodes, the transfer unit being configured to transfer a pattern of the electrodes, and a controller configured to control humidity between the substrate and the transfer unit, the pattern transfer method comprising:
- bringing the electrodes of the transfer unit into contact with the substrate;
- controlling the humidity between the substrate and the transfer unit by the controller;
- and
- transferring the pattern of the electrodes onto the substrate by applying a voltage between the substrate and the electrodes.
Dependencies are inferred from the claim text.