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US 2017/0283313 A1Published application
Fluoride glazes from fluorine ion treatment
AssigneeApplied Materials, Inc.
InventorsChengtsin Lee, Jennifer Y. Sun
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Abstract
An article comprises a body having a coating. The coating comprising a mixture of a first oxide and a second oxide. The coating includes a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride.
Claims20
A method comprising:
- forming an article or a coating comprising an initial mixture comprising a first oxide and a second oxide;
- heating the article or coating to a treatment temperature of at least 910° C.;
- exposing the article or coating to anhydrous hydrogen fluoride gas at the treatment temperature of at least 910° C., wherein exposure of the article or coating to the anhydrous hydrogen fluoride gas at the temperature of at least 910° C. causes:
- replacement of oxygen molecules in the first oxide and the second oxide with fluorine molecules at a surface of the article or the coating;
- transformation of the initial mixture comprising the first oxide and the second oxide into a final mixture comprising a first fluoride and a second fluoride at the surface of the article or the coating;
- formation of a eutectic system from the final mixture, the eutectic system having a super-lattice of the first fluoride and the second fluoride at the surface of the article or the coating;
- and
- formation of a glaze from the eutectic system at the surface of the article or the coating.
5 more elements
An article comprising:
- a body;
- a coating on the body, the coating comprising a mixture of a first oxide of a first metal and a second oxide of a second metal;
- and
- a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride of the first metal and a second fluoride of the second metal.
1 more element
A method comprising:
- heating an article or coating comprising an oxide to a treatment temperature of 350° C. to 1000° C.;
- exposing the article or coating to anhydrous hydrogen fluoride gas at the treatment temperature, wherein exposure of the article or coating to the anhydrous hydrogen fluoride gas at the treatment temperature causes a reaction that replaces oxygen molecules in the oxide with fluorine molecules at a surface of the article or the coating to transform the oxide into a fluoride or into an oxy-fluoride;
- and
- cooling the article or coating.
1 more element
Dependencies are inferred from the claim text.