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US 2017/0283252 A1Published application
Microfabricated pressure transducer
AssigneeInnovative Micro Technology
InventorBenedikt ZEYEN
Life of this patent
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Abstract
A microfabricated pressure transducer is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied.
Claims20
A microfabricated pressure transducer, comprising:
- a substrate of one or more materials with two embedded etch stop layers defining a top, center and bottom substrate part, the top substrate part having a number of shallow wells extending through the top substrate part, and defining a perforated membrane in the top substrate part which is suspended over a void;
- the top and center substrate parts also having a plurality of deep wells, the deep wells being deeper than the shallow wells and extending through the top and center substrate parts, and defining a smaller unperforated membrane on the bottom substrate, wherein the perforated and unperforated membranes form a force-to-pressure transducer.
A method for forming a microfabricated pressure transducer, comprising:
- providing a multilayer substrate having a top, center and bottom layer, wherein the layers are separated by top and bottom etch stop layers;
- forming a plurality of holes through the top layer and top etch stop layer;
- and
- forming a void below the top layer and top etch stop layer and above the bottom layer and bottom etch stop layer, but leaving at least one structure connecting the top and the bottom layers to form the pressure transducer.
1 more element
Dependencies are inferred from the claim text.