Multi-function multi-angle cleaning tool
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHuan-Lisng Tzeng, Chia-Chi Chung, Kuo-Yen Chang
Life of this patent
Estimating the term…
Abstract
In some embodiments, a maintenance apparatus is provided for maintaining semiconductor processing equipment. The maintenance apparatus has an articulated member having a first member with a handle engagement portion and a second member with a first tool engagement portion. The first member is rotationally coupled to the first member about an articulation axis. A first tool member in selective engagement with the first tool engagement portion of the second member.
Claims20
A maintenance apparatus for maintaining semiconductor processing equipment, the maintenance apparatus comprising:
- an articulated member comprising:
- a first member having a handle engagement portion;
- and
- a second member having a first tool engagement portion, wherein the first member is rotationally coupled to the second member about an articulation axis;
- and
- a first tool member in selective engagement with the first tool engagement portion of the second member.
A maintenance apparatus for maintaining semiconductor processing equipment, the maintenance apparatus comprising:
- an articulated member comprising:
- a first member having a handle engagement portion comprising a handle engagement hole defined in the first member, wherein the handle engagement hole is configured to accept a distal end of a handle member therein;
- a second member having a first tool engagement portion comprising a first tool engagement hole defined in the second member, the first tool engagement hole having a first tool engagement axis associated therewith, wherein the first member is rotationally coupled to the second member about an articulation axis, wherein the first tool engagement axis is generally perpendicular to the articulation axis;
- and
- a first tool member, wherein the first tool engagement hole is configured to selectively engage a distal end of the first tool member therein.
A maintenance apparatus for maintaining semiconductor processing equipment, the maintenance apparatus comprising:
- an articulated member comprising:
- a first member having a handle engagement portion comprising a handle engagement hole, a threaded handle fastening hole and a threaded handle fastener, wherein the handle engagement hole is configured to accept a distal end of a handle member therein, and wherein the threaded handle fastening hole intersects the handle engagement hole, wherein the threaded handle fastener is configured to threadingly engage the threaded handle fastener hole and selectively intersect the handle engagement hole, therein selectively securing the distal end of the handle member to the first member;
- a second member having a first tool engagement portion comprising a first tool engagement hole, a first threaded tool fastening hole and a first threaded tool fastener, wherein the first threaded tool fastening hole intersects the first tool engagement hole, wherein the first member is rotationally coupled to the second member about an articulation axis;
- and
- a first tool member, wherein the first tool engagement hole is configured to selectively engage a distal end of the first tool member therein, wherein the first threaded tool fastener is configured to threadingly engage the first threaded tool fastener hole and selectively intersect the first tool engagement hole, therein selectively securing the distal end of the first tool member to the second member.
Dependencies are inferred from the claim text.