Observation apparatus, measurement system and observation method

Abstract

An observation apparatus includes an imaging unit, a driving mechanism and a control unit. The imaging unit takes images of a target object. The driving mechanism moves the imaging unit to change an observation position of the target object. The control unit controls the driving mechanism and the imaging unit while switching between a first mode in which the imaging unit takes images while simultaneously being moved at a high speed by the driving mechanism, and a second mode in which the imaging unit takes images having a higher resolution than the images taken in the first mode while simultaneously being moved at a speed lower than that of the first mode.

Dependencies are inferred from the claim text.