Deposition apparatus for organic light-emitting diodes

A deposition apparatus for an organic light-emitting diode, comprising:

• a support unit configured to support opposite edge portions of a lower surface of a glass loaded thereon, the support unit being positioned within a vacuum chamber and being at least one of:
• vertically movable and rotatable;
• an electrostatic chuck configured to vertically move above the glass and to attract the glass;
• and
• a mask having a set deposition pattern, the mask being positioned underneath the glass.

A method, comprising:

• supporting opposite edge portions of a glass substrate by a movable support unit positioned within a vacuum chamber;
• applying pressure to an upper surface of the glass substrate, at the opposite edge portions, to bend a center portion of the glass substrate in an upward direction;
• moving an electrostatic chuck toward the upper surface of the glass substrate and electromagnetically adhering the glass substrate to the electrostatic chuck;
• and
• positioning a mask having a set deposition pattern underneath the glass substrate.