Piezoelectric film, piezoelectric element including the same, and liquid discharge apparatus
AssigneeFUJIFILM Corporation
InventorNaoki MURAKAMI
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AssigneeFUJIFILM Corporation
InventorNaoki MURAKAMI
Estimating the term…
Provided is a piezoelectric film formed by a vapor phase growth method, the piezoelectric film containing: a perovskite oxide in which a perovskite oxide represented by the following formula P is doped with Si in an amount of from 0.2 mol % to less than 0.5 mol %, wherein a ratio of a peak intensity of a pyrochlore phase to a sum of peak intensities in respective plane orientations of (100), (001), (110), (101) and (111) of a perovskite phase measured by an X-ray diffraction method is 0.25 or less: A1+δ[(ZrxTi1−a)1−aNba]Oy Formula P wherein, in formula P, A is an A-site element primarily containing Pb; Zr, Ti, and Nb are B-site elements; x is more than 0 but less than 1; a is 0.1 or more but less than 0.3.
A piezoelectric film formed by a vapor phase growth method, the piezoelectric film comprising:
Dependencies are inferred from the claim text.