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US 2017/0256569 A1Published application
Semiconductor device and display device and manufacturing method thereof
AssigneeJapan Display Inc.
InventorHiroki OHARA
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Abstract
Provided is a semiconductor device including a first transistor having an oxide semiconductor film, an interlayer film over the first transistor, and second transistor located over the interlayer film and having a semiconductor film including silicon. The interlayer film can include an inorganic insulator. The semiconductor film including silicon can contain polycrystalline silicon. The interlayer film can include an inorganic insulator.
Claims20
A semiconductor device comprising:
- a substrate;
- a first transistor over the substrate, the first transistor including an oxide semiconductor film;
- an interlayer film over the first transistor;
- and
- a second transistor over the interlayer film, the second transistor comprising a semiconductor film including silicon.
2 more elements
A display device comprising:
- a substrate;
- a display region over the substrate, the display region comprising a pixel including a display element;
- and
- a driver circuit over the substrate, the driver circuit being configured to control the display element,
- wherein the pixel comprises:
- a first transistor including an oxide semiconductor film and electrically connected to the display element;
- an interlayer film over the first transistor;
- and
- a second transistor over the interlayer film, the second transistor being electrically connected to the first transistor and including a semiconductor film including silicon.
6 more elements
A method for manufacturing a semiconductor device, the method comprising:
- forming a first transistor including an oxide semiconductor film over a substrate;
- forming an interlayer film over the first transistor;
- and
- forming a second transistor over the interlayer film, the second transistor being electrically connected to the first transistor and comprising a semiconductor film including silicon.
1 more element
Dependencies are inferred from the claim text.