Semiconductor device
AssigneeRenesas Electronics Corporation
InventorKazuo Tomita
Life of this patent
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Abstract
A semiconductor device is a semiconductor device in which one chip region is formed through divided exposure. An interlayer insulating film has a via and an interconnection trench in an element formation region and has a guard ring hole in a guard ring region. An interconnection conductive layer is formed in the via and the interconnection trench. A guard ring conductive layer is formed in the guard ring hole. A minimum dimension of a width of the guard ring conductive layer is greater than a minimum dimension of a width of the interconnection conductive layer in the via.
Claims6
1-4. (canceled)
A semiconductor device having in one chip region, an element formation region and a guard ring region surrounding said element formation region, in which said one chip region is formed through divided exposure, comprising:
- an interlayer insulating film having a guard ring hole extending to surround said element formation region in said guard ring region;
- and
- a guard ring conductive layer burying said guard ring hole,
- said guard ring conductive layer having first and second portions extending in directions different from each other in a plan view and having such a shape that said first and second portions intersect with each other.
Dependencies are inferred from the claim text.