Substrate processing apparatus, substrate processing method, and storage medium
AssigneeTokyo Electron Limited
InventorsHiroaki Inadomi, Satoshi Okamura, Satoshi Biwa
Life of this patent
Estimating the term…
Abstract
Disclosed is a substrate processing apparatus. The substrate processing apparatus includes a container body, and a holding member that conveys the substrate from an outside of the container body into the container body and holds the substrate inside the container body during the processing. A substrate support pin supporting a wafer and a cooling plate cooling the holding member are provided outside the container body.
Claims9
A substrate processing apparatus comprising:
- a container body in which a processing is performed on a substrate;
- a holding member that conveys the substrate from the outside of the container body into the container body and holds the substrate inside the container body during the processing;
- a substrate support pin that is positioned outside the container body and supports a cooling member configured to cool the holding member and the substrate;
- and
- a lift mechanism that moves up and down the cooling member and the substrate support pin with respect to the holding member.
A substrate processing method comprising:
- providing a substrate processing apparatus that includes:
- a container body in which a processing is performed on a substrate;
- a holding member that conveys the substrate from the outside of the container body into the container body and holds the substrate inside the container body during the processing;
- a substrate support pin that is positioned outside the container body and supports a cooling member configured to cool the holding member and the substrate;
- and a lift mechanism that moves up and down the cooling member and the substrate support pin with respect to the holding member;
- conveying the substrate from the outside of the container body into the container body by the holding member;
- performing a processing while holding the substrate inside the substrate processing container by the holding member;
- cooling the holding member by discharging the substrate on the holding member outward, operating the lift mechanism to move up the substrate by the substrate support pin, and simultaneously, causing the cooling member to approach the holding member;
- and
- placing a new substrate on the holding member.
A non-transitory computer-readable storage medium storing a computer executable program that, when executed, causes a computer to control a substrate processing method including:
- providing a substrate processing apparatus that includes:
- a container body in which a processing is performed on a substrate;
- a holding member that conveys the substrate from the outside of the container body into the container body and holds the substrate inside the container body during the processing;
- a substrate support pin that is positioned outside the container body and supports a cooling member configured to cool the holding member and the substrate;
- and a lift mechanism that moves up and down the cooling member and the substrate support pin with respect to the holding member;
- conveying the substrate from the outside of the container body into the container body by the holding member;
- performing a processing while holding the substrate inside the substrate processing container by the holding member;
- cooling the holding member by discharging the substrate on the holding member to the outside and operating the lift mechanism to move up the substrate by the substrate support pin and simultaneously causing the cooling member to approach the holding member;
- and
- placing a new substrate on the holding member.
Dependencies are inferred from the claim text.