Magnetic Spattering Coating Device and Target Device Thereof
AssigneesShenzhen China Star Optoelectronics Technology Co., Ltd., Wuhan China Star Optoelectronics Technology Co., Ltd.
InventorTao ZHOU
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Abstract
A target device for a magnetic spattering coating device includes: a spattering target fixture; a target bearing plate installed on the spattering target fixture, for bearing a target; a magnetic pole device fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target. A predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate. The present invention can not only enhances utilization of the target but also makes the thin film deposited on the substrate highly well-distributed.
Claims13
A target device for a magnetic spattering coating device, comprising:
- a spattering target fixture;
- a target bearing plate, installed on the spattering target fixture, for bearing a target;
- a magnetic pole device, fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target;
- wherein a predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate.
A magnetic spattering coating device comprising a target device, the target device comprising:
- a spattering target fixture;
- a target bearing plate, installed on the spattering target fixture, for bearing a target;
- a magnetic pole device, fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target;
- wherein a predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate.
Dependencies are inferred from the claim text.