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AssigneeFEI Company
InventorsValerie Brogden, Jeffrey Blackwood, Michael Schmidt, Dhruti Trivedi, Richard J. Young, Thomas G. Miller, Brian Roberts Routh, JR., Stacey Stone, Todd Templeton
Estimating the term…
Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.
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A method for automated sample preparation in a charged particle beam system, comprising:
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A method for automated preparation in a charged particle beam system of a sample for viewing a region of interest in a transmission electron microscope, comprising:
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A sample for examination under a transmission electron microscope, comprising:
Dependencies are inferred from the claim text.