Device inspection method, probe card, interposer, and inspection apparatus

A probe card which is provided between a tester for inspecting electrical characteristics of a plurality of devices formed on a substrate and the substrate, the probe card comprising:

• a plurality of probes to be brought into contact with respective electrode pads of the devices, and
• a base plate configured to hold the probes,
• wherein the base plate includes:
• an input line connected to the respective probes and configured to transfer test signals from the tester to the respective devices;
• a plurality of individual output lines connected to the respective probes and configured to transfer response signals from the respective devices based on the test signals;
• and
• a common output line configured to combine the individual output lines, synthesize the response signals from the respective devices, and transmit a synthesized signal toward the tester,
• wherein the respective individual output lines are provided with resistors having resistances greater than internal resistances of the respective devices.

An interposer which is provided between a tester for inspecting electrical characteristic of a plurality of devices formed on a substrate and the substrate, the interposer comprising:

• an input line configured to transmit test signals from the tester toward the respective devices;
• a plurality of individual output lines configured to transmit response signals from the respective devices based on the test signals;
• and
• a common output line configured to combine the respective individual output lines, synthesize the response signals from the respective devices, and transmit a synthesized signal toward the tester,
• wherein the respective individual output lines are provided with resistors having resistances greater than internal resistances of the respective devices.

An inspection apparatus for inspecting electrical characteristics of a plurality of devices formed on a substrate, comprising:

• a pattern generator configured to generate test signals for inspecting the respective devices;
• a comparator configured to compare a synthesized response signal of response signals from the respective devices based on the test signals with a threshold value;
• and
• a signal input/output circuit provided between the pattern generator and the comparator, and the devices,
• wherein the signal input/output circuit includes:
• an input line configured to transmit the test signals toward the respective devices;
• a plurality of individual output lines configured to transmit response signals from the respective devices based on the test signals;
• and
• a common output line configured to combine the respective individual output lines, synthesize the response signals from the respective devices, and transmit a synthesized signal toward the tester, and
• wherein the respective individual output lines are provided with resistors having resistances greater than internal resistances of the respective devices.