Measurement apparatus, system, measurement method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorAkihiro Yamada
Life of this patent
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Abstract
A measurement apparatus including an imaging device configured to perform imaging of an object to output image information, and perform measurement of arrangement of the object in a state where at least one of the object and the imaging device is moving, comprising: a processor configured to obtain information of the arrangement based on the output image information, wherein the processor is configured to perform a process of synchronization between the imaging and measurement of a position of the at least one.
Claims19
A measurement apparatus that includes an imaging device configured to perform imaging of an object to output image information, and perform measurement of arrangement of the object in a state where at least one of the object and the imaging device is moving, the apparatus comprising:
- a processor configured to obtain information of the arrangement based on the output image information,
- wherein the processor is configured to perform a process of synchronization between the imaging and measurement of a position of the at least one.
A measurement method of performing measurement of arrangement of an object in a state where at least one of an imaging device that performs imaging of the object to output image information and the object is moving, comprising steps of:
- performing a process of synchronization between the imaging and measurement of a position of the at least one,
- obtaining information of the arrangement based on the output image information obtained via the process of the synchronization.
A method of manufacturing an article, the method comprising steps of:
- performing measurement of arrangement of an object using a measurement apparatus;
- and
- performing processing of the object, of which the measurement has been performed, to manufacture the article,
- wherein the measurement apparatus includes an imaging device configured to perform imaging of an object to output image information, and performs measurement of arrangement of the object in a state where at least one of the object and the imaging device is moving, and includes:
- a processor configured to obtain information of the arrangement based on the output image information,
- wherein the processor is configured to perform a process of synchronization between the imaging and measurement of a position of the at least one.
A method of manufacturing an article, the method comprising steps of:
- performing measurement of arrangement of an object using a system;
- and
- performing processing of the object, of which the measurement has been performed, to manufacture the article,
- wherein the system includes:
- a measurement apparatus;
- and
- at least one of a device that supports and moves the measurement apparatus and a device that holds and moves the object,
- wherein the measurement apparatus includes an imaging device configured to perform imaging of an object to output image information, and performs measurement of arrangement of the object in a state where at least one of the object and the imaging device is moving, and includes:
- a processor configured to obtain information of the arrangement based on the output image information,
- wherein the processor is configured to perform a process of synchronization between the imaging and measurement of a position of the at least one.
A method of manufacturing an article, the method comprising steps of:
- performing measurement of arrangement of an object using a measurement method;
- and
- performing processing of the object, of which the measurement has been performed, to manufacture the article,
- wherein the measurement method performs measurement of arrangement of an object in a state where at least one of an imaging device that performs imaging of the object to output image information and the object is moving, and includes steps of:
- performing a process of synchronization between the imaging and measurement of a position of the at least one,
- obtaining information of the arrangement based on the output image information obtained via the process of the synchronization.
A measurement apparatus that includes an imaging device supported by a moving device and performing imaging of an object to output image information, and performs measurement of arrangement of the object in a state where the imaging device is moving, the apparatus comprising:
- a processor configured to obtain information of the arrangement based on the output image information,
- wherein the processor is configured to provide, to the moving device, first information for specifying a predetermined time point in a period of the imaging to perform synchronization between the imaging and measurement, by the moving device, of a position of the imaging device.
Dependencies are inferred from the claim text.