Positive photosensitive resin composition, photo-curable dry film and method for producing the same, patterning process, and laminate

A positive photosensitive resin composition comprising:

• (A) a polymer compound containing a siloxane chain, the polymer compound having a repeating unit shown by the following general formula (1) and a weight average molecular weight of 3,000 to 500,000;
• (B) a photosensitive material capable of generating an acid by light and increasing a dissolution rate in an aqueous alkaline solution;
• (C) one or two or more crosslinking agents selected from an amino condensate modified with formaldehyde or formaldehyde-alcohol, a phenol compound having on average two or more methylol groups or alkoxymethylol groups per molecule, a polyhydric phenol compound in which a hydrogen atom of a phenolic hydroxyl group is substituted with a glycidyl group, a polyhydric phenol compound in which a hydrogen atom of a phenolic hydroxyl group is substituted with a substituent shown by the following formula (C-1), and a compound containing two or more nitrogen atoms having a glycidyl group and shown by the following formula (C-2);
• and
• (D) a solvent,
• wherein R1 to R4 are the same or different and represent a monovalent organic group having 1 to 15 carbon atoms and optionally containing an oxygen atom;
• R18 and R19 are the same or different and represent a monovalent organic group having 1 to 28 carbon atoms and optionally containing an oxygen atom;
• “m” represents an integer of 1 to 100;
• “o” represents an integer of 0 to 100;
• “a”, “b”, “c”, “d”, “e” “f”, “g”, “h”, “i”, and “j” are each 0 or a positive number, provided that when “g” and “h” are 0, “i” and “j” are a positive number, and when “i” and “j” are 0, “g” and “h” are a positive number;
• a+b+c+d+e+f+g+h+i+j=1;
• X represents a divalent organic group shown by the following general formula (2) or the following general formula (3);
• Y represents a divalent organic group shown by the following general formula (4);
• W represents a divalent organic group shown by the following general formula (5);
• U represents a divalent organic group shown by the following general formula (6);
• and S represents a divalent organic group shown by the following general formula (7),
• wherein Z represents a divalent organic group selected from any of
• the dotted line represents a bond;
• “n” represents 0 or 1;
• R5 and R6 each represent an alkyl group or alkoxy group having 1 to 4 carbon atoms and are the same or different from each other;
• and “x” represents 0, 1, or 2;
• wherein V represents a divalent organic group selected from any of
• the dotted line represents a bond;
• “p” represents 0 or 1;
• R7 and R8 each represent an alkyl group or alkoxy group having 1 to 4 carbon atoms and are the same or different from each other;
• and “y” represents 0, 1, or 2;
• wherein the dotted line represents a bond;
• T represents an alkylene group having 1 to 10 carbon atoms or a divalent aromatic group;
• and R9 represents a hydrogen atom or a methyl group;
• wherein the dotted line represents a bond;
• T and R9 have the same meanings as defined above;
• and R10 represents a monovalent carboxyl-containing organic group,
• wherein the dotted line represents a bond;
• Rc represents a linear, branched, or cyclic alkyl group having 1 to 6 carbon atoms;
• and “s” represents 1 or 2.