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US 2017/0254847 A1Published application
Arc detector and a method for detecting arcs
AssigneeApplied Materials Israel Ltd.
InventorsTuvia Biber, Efim Kerner, Efraim Siman Tov
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Abstract
A system comprising: a first high voltage unit that is coupled via a high voltage supply cable to a second high voltage unit; a transformer that is configured to magnetically couple the high voltage supply cable to windings of a transformer; and a detection unit that is configured to monitor a windings signal developed in the windings of the transformer to detect a first high voltage unit arc formed within the first high voltage unit and to detect a second high voltage unit arc formed within the second high voltage unit.
Claims15
A system comprising:
- a first high voltage unit that is coupled via a high voltage supply cable to a second high voltage unit;
- a transformer configured to magnetically couple the high voltage supply cable to windings of a transformer;
- and
- a detection unit configured to monitor a windings signal developed in the windings of the transformer to detect a first high voltage unit arc formed within the first high voltage unit and to detect a second high voltage unit arc formed within the second high voltage unit.
1 more element
An arc detector comprising:
- a transformer that once positioned to surround a high voltage supply cable, to magnetically couple the high voltage supply cable to windings of the transformer;
- wherein the high voltage supply cable is configured to couple between a first high voltage unit and a second high voltage unit;
- and
- a detection unit that is configured to monitor a windings signal developed in the windings of the transformer to detect a first high voltage unit arc formed within the first high voltage unit and to detect a second high voltage unit formed within the second high voltage unit.
1 more element
A method comprising:
- monitoring, by a detection unit, a windings signal developed in windings of a transformer to detect a first high voltage unit arc formed within the first high voltage unit and to detect a second high voltage unit formed within the second high voltage unit;
- and
- wherein the transformer magnetically couples the windings to a high voltage supply cable that couples the first high voltage unit to the second high voltage unit.
Dependencies are inferred from the claim text.