Modular Atomic Force Microscope

An atomic force microscope system operating to characterize a sample, comprising:

• a chassis;
• an atomic force microscope cantilever, coupled to the chassis;
• an isolation system, forming an enclosure that encloses the chassis, and provides acoustic and thermal isolation for the atomic force microscope system;
• a view system, coupled to said chassis, that has optical features which allow optical viewing in an area of the cantilever or of the sample, said view system having a light source emitting light along a first optical axis, an image receiving structure located along a second optical axis spaced from and parallel to the first optical axis, a focus adjustment mechanism formed of a first lens group and a second lens group, each of said lens groups including multiple lenses, and said first lens group being movable, and the second lens group being fixed, said first and second lens groups each being along a common optical axis, said light from said light source being produced along said first optical axis directed toward said cantilever;
• and a reflected beam from said cantilever being received along said second optical axis;
• and an objective lens, located to direct said first light beam to said cantilever, to direct said second light beam to said cantilever, and to direct the reflected light beam from the cantilever along the second optical axis;
• and
• wherein said enclosure has a door that is opened to reach the inside, the door having a sensor, and after the door is opened, the heater and laminar flow are run at higher levels for a time, to stabilize a temperature and then the heater and laminar flow are run at lower levels after said time.

A system, comprising:

• an atomic force microscope system, that includes a scanner subsystem that includes a cantilever therein and structure for determining movement of the cantilever, and structure for holding a sample;
• and includes at least one sample illuminating structure;
• a view system, coupled to said chassis, that has optical features which allow optical viewing in an area of the cantilever or of the sample, said view system having a light source emitting light along a first optical axis, an image receiving structure located along a second optical axis spaced from and parallel to the first optical axis, a focus adjustment mechanism formed of a first lens group and a second lens group, each of said lens groups including multiple lenses, and said first lens group being movable, and the second lens group being fixed, said first and second lens groups each being along a common optical axis, said light from said light source being produced along said first optical axis directed toward said cantilever;
• and a reflected beam from said cantilever being received along said second optical axis;
• and an objective lens, located to direct said first light beam to said cantilever, to direct said second light beam to said cantilever, and to direct the reflected light beam from the cantilever along the second optical axis;
• an isolation system, forming an enclosure that encloses the atomic force microscope system, and provides acoustic and thermal isolation for the atomic force microscope system, said isolation system including a first heater under said atomic force microscope system, and a duct providing a laminar flow of heated air into an inside of the enclosure;
• a closed loop temperature control, controlling a temperature of said inside of the enclosure by controlling power to said first heater, and controlling a heating aspect of said laminar flow;
• wherein said enclosure has a door that is opened to reach the inside, the door having a sensor, and after the door is opened, the heater and laminar flow are run without said closed loop for a time, to stabilize a temperature and then the heater and laminar flow are run with the closed loop after said time.