Gas sensor device, gas measurement method, and gas measurement device
AssigneeFujitsu Limited
InventorsKazuaki Karasawa, Michio USHIGOME, Satoru Momose, Ryozo Takasu, Osamu Tsuboi
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AssigneeFujitsu Limited
InventorsKazuaki Karasawa, Michio USHIGOME, Satoru Momose, Ryozo Takasu, Osamu Tsuboi
Estimating the term…
A gas sensor device includes: a sensor film including a sensor surface and a resistance which increases with an increase in an amount of gas adsorbed on the sensor surface; a first electrode, a second electrode, and a third electrode that are electrically coupled to the sensor film; and a protective film that covers the sensor surface in a region between the first electrode and the second electrode, wherein the sensor surface is exposed in a region near the third electrode.
A gas sensor device comprising:
A gas measurement method comprising:
A gas measurement device comprising:
Dependencies are inferred from the claim text.