Inspection Apparatus, Inspection Method, And Program
AssigneeKeyence Corporation
InventorHajime Matsuda
Life of this patent
Estimating the term…
Abstract
To facilitate adjusting of a distance from an inspection target to an illumination section by providing a movable illumination section that is movable independently of the imaging section. An illumination apparatus has a plurality of LEDs arranged in a substantially annular form, a light diffusion member for diffusing light emitted from the plurality of LEDs, and a lighting control part for lighting the plurality of light sources in accordance with a predetermined lighting pattern when designated to start lighting. In particular, the illumination apparatus moves independently of a camera to adjust a distance to a workpiece.
Claims15
1-15. (canceled)
An inspection apparatus comprising:
- an illumination section which has a plurality of light segments to illuminate the inspection target from three or more illumination directions;
- a storage section to store a lighting data including lighting time of the plurality of light segments and interval information indicating a lighting interval of the plurality of light segments;
- a processor for controlling the illumination section to light the plurality of light segments with reference to the lighting data stored in the storage section when designated to start lighting, and generating an trigger signal for designating a start of imaging in conjunction with the start of the illumination:
- an imaging section for capturing a plurality of luminance images of an inspection target in accordance with the trigger signal;
- an inspection image generating section for obtaining a normal vector of a surface of the inspection target based on the three or more luminance images acquired by the imaging section and generating an inspection image based on the normal vector by a photometric stereo method;
- and
- a determination section for determining defectiveness/non-defectiveness of the inspection target by using the inspection image.
Dependencies are inferred from the claim text.