Optical profilometer

A method comprising:

• configuring an optical path to couple light between a light source, a sample when present, and a detector;
• configuring an optical objective to couple light from the light source to the sample when present, and couple reflected light to the detector;
• controlling at least one of focus and beam path of the light directed by the optical objective to the sample when present;
• configuring the optical path to include a spatially variable filter (SVF) to control properties of at least one of the light and the reflected light, wherein the SVF is configured to pass light having spectral properties that vary as a function of a position of illumination on the SVF;
• configuring the detector to receive reflected light from the optical objective and to generate from the reflected light an output representing a film thickness and a surface profile of the sample when present.