Method for determining height information of a sample, and scanning microscope

Abstract

The invention relates to a method for determining height information of a sample, and to a scanning microscope. The method comprises the following steps: generating an illumination spot; illuminating the sample with the illumination spot; capturing an image of a reflection of the illumination spot at the sample; evaluating the lateral distribution of the image; determining the height information from the lateral distribution; wherein the illumination spot has a three dimensional illumination pattern and/or the image in a detection beam path has a three dimensional detection pattern. The scanning microscope is characterized in that an illumination device (07) and/or a detector device comprise(s) a means for generating a three dimensional pattern with a change in the lateral intensity distribution that is asymmetrical along the optical axis, and an evaluation device is configured to determine height information from the detector signal.

Dependencies are inferred from the claim text.