Substrate processing apparatus, substrate processing method, and storage medium

A substrate processing method, comprising:

• carrying a substrate on which a dry preventing liquid is filled into a processing container;
• supplying a processing fluid to the processing container through a fluid supply line;
• performing a supercritical processing on the substrate in the processing container using the processing fluid;
• discharging the processing fluid in the processing container through a fluid discharge line;
• and
• circulating the processing fluid in the processing container by a first circulation line that is provided independently from the fluid supply line and the fluid discharge line,
• wherein the processing fluid from the processing container is received by a first reservoir tank that is provided in the first circulation line and has a capacity larger than that of the processing container.

A non-transitory computer-readable storage medium that stores a program which, when executed, causes a computer to execute a substrate processing method, the substrate processing method including:

• carrying a substrate on which a dry preventing liquid is filled into a processing container;
• supplying a processing fluid to the processing container through a fluid supply line;
• performing a supercritical processing on the substrate in the processing container using the processing fluid;
• discharging the processing fluid in the processing container through a fluid discharge line;
• and
• circulating the processing fluid in the processing container by a first circulation line that is provided independently from the fluid supply line and the fluid discharge line,
• wherein the processing fluid from the processing container is received by a first reservoir tank that is provided in the first circulation line and has a capacity larger than that of the processing container.