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US 2017/0253974 A1Published application
Components such as edge rings including chemical vapor deposition (cvd) diamond coating with high purity sp3 bonds for plasma processing systems
AssigneeLam Research Corporation
InventorJustin Charles CANNIFF
Life of this patent
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Abstract
A pedestal for a plasma processing system includes a substrate supporting surface. An annular edge ring is arranged around a periphery of the substrate supporting surface. A chemical vapor deposition (CVD) diamond coating is arranged on a plasma-exposed surface of the annular ring. The CVD diamond coating includes sp3 bonds. A purity of the sp3 bonds in the diamond coating is greater than 90%.
Claims28
A pedestal for a plasma processing system, comprising:
- a substrate supporting surface;
- an annular edge ring arranged around a periphery of the substrate supporting surface;
- and
- a diamond coating arranged on a plasma-exposed surface of the annular edge ring,
- wherein the diamond coating includes sp3 bonds, and
- wherein a purity of the sp3 bonds in the diamond coating is greater than 90%.
3 more elements
A plasma processing system, comprising:
- a processing chamber;
- a plasma source to one of supply plasma to the processing chamber and create plasma in the processing chamber;
- and
- at least one component arranged in the processing chamber including a diamond coating,
- wherein the diamond coating includes sp3 bonds, and
- wherein a purity of the sp3 bonds in the diamond coating is greater than 90%.
3 more elements
An edge ring for a plasma processing system, comprising:
- an annular ring;
- and
- a diamond coating arranged on a surface of the annular ring that is exposed to plasma during use,
- wherein the diamond coating includes sp3 bonds, and
- wherein a purity of the sp3 bonds in the diamond coating is greater than 90%.
2 more elements
A component for a plasma processing system, comprising:
- a surface that is exposed to plasma during use of the plasma processing system;
- and
- a diamond coating arranged on the surface of the component,
- wherein the diamond coating includes sp3 bonds, and
- wherein a purity of the sp3 bonds in the diamond coating is greater than 90%.
2 more elements
Dependencies are inferred from the claim text.