Micro-electro-mechanical device and manufacturing process thereof
AssigneeSTMicroelectronics S.r.l.
InventorsLorenzo BALDO, Enri DUQI, Flavio Francesco VILLA
Life of this patent
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Abstract
A micro-electro-mechanical device formed in a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region above the first buried cavity; and a second buried cavity extending in the sensitive region. A decoupling trench extends from a first face of the monolithic body as far as the first buried cavity and laterally surrounds the second buried cavity. The decoupling trench separates the sensitive region from a peripheral portion of the monolithic body.
Claims18
A micro-electro-mechanical device, comprising:
- a monolithic body of semiconductor material;
- a first buried cavity in the monolithic body of semiconductor material;
- a sensitive region in the monolithic body facing the first buried cavity;
- and
- a decoupling trench extending into the monolithic body as far as the first buried cavity, the decoupling trench decoupling the sensitive region from a peripheral portion of the monolithic body and forming the sensitive region.
A micro-electro-mechanical device, comprising:
- a monolithic body of semiconductor material;
- a buried cavity in the monolithic body of semiconductor material;
- a sensitive region in the monolithic body covering the buried cavity;
- and
- a movable element including a central portion and a perimeter portion, the perimeter portion coupled to the sensitive region, the central portion of the movable element being separated from the sensitive region by a second cavity.
An electronic apparatus comprising:
- a microprocessor;
- and
- a micro-electro-mechanical device including:
- a monolithic body of semiconductor material;
- a buried cavity in the monolithic body of semiconductor material;
- a sensitive region in the monolithic body facing the buried cavity;
- and
- a decoupling trench extending into the monolithic body as far as the buried cavity, the decoupling trench decoupling the sensitive region from a peripheral portion of the monolithic body and forming the sensitive region.
Dependencies are inferred from the claim text.