Metal contamination preventing method and apparatus and substrate processing method and apparatus using the same
AssigneeTokyo Electron Limited
InventorsSatoru KOIKE, Keiichi TANAKA
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Abstract
A metal contamination preventing method to be performed prior to using a metal component coated with a passivation film formed of chromium oxide includes generating chromium nitrate by supplying a nitric acid to the passivation film covering a surface of the metal component, and reacting the chromium oxide with the nitric acid and removing chromium from the passivation film by evaporating the chromium nitrate.
Claims25
A metal contamination preventing method to be performed prior to using a metal component coated with a passivation film formed of chromium oxide, the method comprising:
- generating chromium nitrate by supplying a nitric acid to the passivation film covering a surface of the metal component, and reacting the chromium oxide with the nitric acid;
- and
- removing chromium from the passivation film by evaporating the chromium nitrate.
A metal contamination preventing apparatus for performing a metal contamination preventing process prior to using a metal component coated with a passivation film formed of chromium oxide, the apparatus comprising:
- a nitric-acid supply unit configured to supply a nitric acid to the passivation film covering a surface of the metal component;
- and
- an evaporation unit configured to evaporate chromium nitrate generated by a reaction of the nitric acid, which has been supplied by the nitric-acid supply unit, and the chromium oxide.
Dependencies are inferred from the claim text.