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US 2017/0250335 A1Published application
Surface acoustic wave device and duplexer having transmission/reception filter using same
AssigneeMurata Manufacturing Co., Ltd.
InventorYasumasa TANIGUCHI
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Abstract
A surface acoustic wave device includes a piezoelectric substrate and an IDT electrode on the piezoelectric substrate. The IDT electrode includes a main electrode layer and a barrier layer between the piezoelectric substrate and the main electrode layer. The main electrode layer is inside a region in which the barrier layer is provided in plan view to suppress diffusion between the piezoelectric substrate and the main electrode layer when a voltage is applied to the IDT electrode.
Claims21
A surface acoustic wave device comprising:
- a piezoelectric substrate;
- and
- an IDT electrode on the piezoelectric substrate;
- wherein
- the IDT electrode includes a first conductor layer, and a second conductor layer between the piezoelectric substrate and the first conductor layer;
- and
- the first conductor layer is inside a region in which the second conductor layer is provided in plan view to suppress diffusion between the piezoelectric substrate and the first conductor layer when a voltage is applied to the IDT electrode.
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Dependencies are inferred from the claim text.