Mask for deposition, apparatus for manufacturing display apparatus having the same, and method of manufacturing display apparatus with manufacturing display apparatus having mask for deposition

An apparatus for manufacturing a pattern on a substrate of a display apparatus, the apparatus comprising:

• a deposition mask frame assembly facing the substrate;
• and
• a deposition source facing the deposition mask frame assembly to dispose the deposition mask frame assembly between the substrate and the deposition source,
• wherein the deposition mask frame assembly comprises:
• a frame comprising an opening at a center portion thereof;
• a deposition mask which is installed on the frame to face the substrate, a length of the deposition mask extended in a first direction;
• and
• a support of which a length thereof extends in a second direction crossing the first direction and across the opening of the frame, the support overlapping a portion of the deposition mask and supporting the deposition mask which is installed on the frame,
• wherein the deposition mask is extendable along the first direction thereof by a force applied thereto by a clamp attached to the deposition mask, the deposition mask comprising:
• a deposition pattern unit comprising a plurality of deposition pattern holes through which a deposition material for forming the pattern passes to the substrate;
• and
• a distal end to which the clamp is attached, the distal end extended in the first direction of the deposition mask from the deposition pattern unit to a distal edge of the deposition mask, the distal end comprising:
• a clamping groove open at the distal edge of the deposition mask;
• and
• a dummy pattern unit disposed between the clamping groove and the deposition pattern unit in the first direction of the deposition mask,
• wherein
• the clamping groove and the dummy pattern unit are provided in plural along the second direction, and
• in the first direction of the deposition mask,
• a portion of each clamping groove overlaps a corresponding dummy pattern unit,
• in the second direction of the deposition mask,
• the number of the clamping grooves and the number of the dummy pattern units correspond to each other,
• an area of the distal end at which the portion of distal end does not overlap the corresponding dummy pattern unit defines a first area of the distal end to which a clamp is applied, and
• an area of the distal end at which the portion of each clamping groove overlaps the corresponding dummy pattern unit defines a second area of the distal end.

A method of manufacturing a display apparatus having a pattern on a substrate, the method comprising:

• inserting the substrate and a deposition mask assembly into an inside of a deposition chamber;
• aligning the substrate and the deposition mask frame assembly with each other;
• and
• depositing on the substrate a deposition material for forming the pattern, by ejecting the deposition material from a deposition source and passing the ejected deposition material through the deposition mask frame assembly to the substrate,
• wherein the deposition mask frame assembly comprises:
• a frame comprising an opening at a center portion thereof;
• a deposition mask which is installed on the frame to face the substrate, a length of the deposition mask extended in a first direction;
• and
• a support of which a length thereof extends in a second direction crossing the first direction and across the opening of the frame, the support overlapping a portion of the deposition mask and supporting the deposition mask which is installed on the frame,
• wherein the deposition mask is extendable along the first direction thereof by a force applied thereto by a clamp attached to the deposition mask, the deposition mask comprising:
• a deposition pattern unit comprising a plurality of deposition pattern holes, through which the ejected deposition material passes to the substrate;
• and
• a distal end to which the clamp is attached, the distal end extended in the first direction of the deposition mask from the deposition pattern unit to a distal edge of the deposition mask, the distal end comprising:
• a clamping groove open at the distal edge of the deposition mask;
• and
• a dummy pattern unit disposed between the clamping groove and the deposition pattern unit in the first direction of the deposition mask, and
• wherein
• the clamping groove and the dummy pattern unit are provided in plural along the second direction;
• and
• in the first direction of the deposition mask,
• a portion of each clamping groove overlaps a corresponding dummy pattern unit,
• in the second direction of the deposition mask, the number of the clamping grooves and the number of the dummy pattern units correspond to each other,
• an area of the distal end at which the portion of the distal end does not overlap the corresponding dummy pattern unit defines a first area of the distal end to which a clamp is applied, and
• an area of the distal end at which the portion of each clamping groove overlaps the corresponding dummy pattern unit defines a second area of the distal end.