Electronic device including moat power metallization in trench
AssigneeGlobalfoundries Inc.
InventorsJosephine B. Chang, Leland Chang, Michael A. Guillorn, Chung-Hsun Lin, Adam M. Pyzyna
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AssigneeGlobalfoundries Inc.
InventorsJosephine B. Chang, Leland Chang, Michael A. Guillorn, Chung-Hsun Lin, Adam M. Pyzyna
Estimating the term…
An electronic device is provided. The electronic device includes a semiconductor layer, a dielectric layer disposed on the semiconductor layer, circuitry disposed on the dielectric layer that includes interconnected cells, first contact line metallization and second contact line metallization, first power metallization disposed in-plane with or above the circuitry and second power metallization disposed in a trench defined in at least the dielectric layer. The electronic device further includes insulation disposed to insulate the second power metallization from the circuitry and the first power metallization at first locations and to permit electrical communication between the second power metallization, the circuitry and the first power metallization at second locations.
A method of forming an electronic device, the method comprising:
Dependencies are inferred from the claim text.