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AssigneeMattson Technology, Inc.
InventorsWei-Hua Liou, Chun-Yen Kang, Vijay M. Vaniapura, Hai-Au M. Phan-Vu, Shawming Ma
Estimating the term…
Processes for removing a photoresist from a substrate after, for instance, ion implantation are provided. In one example implementation, a process can include placing a substrate having a bulk photoresist and a crust formed on the bulk photoresist in a processing chamber. The process can include initiating a first strip process in the processing chamber. The process can include accessing an optical emission signal associated with a plasma during the first strip process. The process can include identifying an endpoint for the first strip process based at least in part on the optical emission signal. The process can include terminating the first strip process based at least in part on the endpoint. The process can include initiating a second strip process to remove the photoresist from the substrate.
A process for removal of photoresist from a substrate, comprising:
A process for removing photoresist from a substrate, comprising:
A strip process for removing photoresist from a substrate, comprising:
Dependencies are inferred from the claim text.