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US 2017/0248847 A1Published application
Composition for base, and directed self-assembly lithography method
AssigneeJsr Corporation
InventorsHiroyuki KOMATSU, Takehiko NARUOKA, Shinya MINEGISHI, Kaori SAKAI, Tomoki NAGAI
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Abstract
A composition for a base of a directed self-assembling film includes a compound including an oxo acid group, and a solvent. The compound is preferably represented by formula (1). A represents an organic group having 10 or more carbon atoms and having a valency of n. B represents an oxo acid group. n is an integer of 1 to 200. In a case where n is 2 or greater, a plurality of Bs are identical or different. AB)n (1)
Claims13
A composition for a base of a directed self-assembling, the composition comprising:
- a compound comprising an oxo acid group;
- and
- a solvent,
- wherein the oxo acid group is a phosphoric acid group, a phosphono group, a sulfo group, a sulfuric acid group, a carboxy group, or a combination thereof,
- wherein the compound is represented by formula (1):
- AB)n (1)
- wherein, in the formula (1), A represents an organic group having 10 or more carbon atoms and having a valency of n;
- B represents the oxo acid group;
- and n is an integer of 1 to 200, wherein in a case where n is 2 or greater, a plurality of Bs are identical or different, and
- wherein when n is 1, A represents a polymer or a chain organic group, and the oxo group binds to an end of a main chain of the polymer or the chain organic group, and when n is an integer of 2 to 200, the compound is a copolymer comprising a first monomer unit which comprises the oxo group and a second monomer unit other than the first monomer unit, and an amount of the first monomer unit with respect to a total of monomer units in the copolymer is from 0.01 to 20 mol %.
7 more elements
2-3. (canceled)
Dependencies are inferred from the claim text.