Relative humidity sensor and method
AssigneeHoneywell International Inc.
InventorsBogdan-Catalin Serban, Mihai Brezeanu, Octavian Bulu, Cornel P. Cobianu
Life of this patent
Estimating the term…
Abstract
A relative humidity sensor is disclosed. The relative humidity sensor includes a first electrode and a second electrode disposed above a dielectric substrate. A humidity sensitive layer is disposed above at least one of the first electrode and the second electrode, where the humidity sensitive layer comprises a curable composition comprising cellulose acetate butyrate and a hydrophobic filler. In some embodiments, a dust protection layer is disposed above the humidity sensitive layer.
Claims16
A relative humidity sensor, comprising:
- a first electrode and a second electrode disposed above a dielectric substrate;
- and
- a humidity sensitive layer disposed above at least one of the first electrode and the second electrode, the humidity sensitive layer comprising a curable composition comprising cellulose acetate butyrate and a hydrophobic filler.
A method of forming a relative humidity sensor, the method comprising:
- depositing a first electrode on a dielectric substrate;
- applying a composition to an upper surface of the first electrode to form a humidity sensitive layer, the composition comprising a curable composition comprising cellulose acetate butyrate and a hydrophobic filler;
- depositing a second electrode on an upper surface of the humidity sensitive layer;
- and
- depositing a dust protection layer on an upper surface of the second electrode.
A method of forming a relative humidity sensor, the method comprising:
- preparing a composition, the composition comprising a curable composition comprising cellulose acetate butyrate and a hydrophobic filler;
- and
- depositing at least a portion of the composition on a dielectric substrate supporting a first electrode and a second electrode, wherein the first and second electrode are interdigitated, to form the relative humidity sensor.
Dependencies are inferred from the claim text.