Apparatus for forming crystalline sheet from a melt
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsDawei SUN, Peter L. KELLERMAN, Gregory Thronson
Life of this patent
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Abstract
An apparatus for drawing a crystalline sheet from a melt. The apparatus may include a crucible configured to contain the melt and having a dam structure, where the melt comprises an exposed surface having a level defined by a top of the dam structure. The apparatus may further include a support apparatus disposed within the crucible and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus, and may include a melt-back heater directing heat through the upper surface of the support apparatus to partially melt the crystalline sheet when the crystalline sheet is drawn over the support apparatus.
Claims20
An apparatus for drawing a crystalline sheet from a melt, comprising:
- a crucible configured to contain the melt and having a dam structure, the melt comprising an exposed surface having a level defined by a top of the dam structure;
- a support apparatus disposed within the crucible and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus;
- and
- a melt-back heater directing heat through the upper surface of the support apparatus to partially melt the crystalline sheet when the crystalline sheet is drawn over the support apparatus.
An apparatus for growing a crystalline sheet from a melt, comprising:
- a crucible configured to contain the melt and having a dam structure, the melt having an exposed surface defined by a top of the dam structure;
- a crystallizer disposed above the melt to remove heat in a cooling zone from the exposed surface of the melt, wherein a leading edge of the crystalline sheet forms at the exposed surface in the cooling zone, the crystalline sheet having an initial sheet thickness;
- and
- a support apparatus disposed within the crucible downstream of the crystallizer and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus.
A method of growing a crystalline sheet from a melt, comprising:
- forming the crystalline sheet on an exposed surface of a melt in a crucible having a dam structure, the exposed surface defined by a top of the dam structure;
- measuring a first position of a surface of the crystalline sheet with respect to the exposed surface;
- placing an upper surface of a support apparatus at a first level based on the first position;
- and
- drawing the crystalline sheet along a first direction over the upper surface of the support apparatus wherein the crystalline sheet is maintained flush with the exposed surface.
Dependencies are inferred from the claim text.