Method for euv power improvement with fuel droplet trajectory stabilization

An EUV radiation source, comprising:

• a tin droplet generator configured to generate a plurality of un-charged tin droplets;
• an electron gun configured to generate an electron beam of electrons that is incident upon the plurality of un-charged tin droplets, wherein upon hitting the plurality of un-charged tin droplets electrons from the electron beam attach to the plurality of un-charged tin droplets to generate a plurality of charged tin droplets having a net negative electrical charge, wherein the electron gun comprises:
• a hot cathode configured to generate electrons via thermionic emission;
• a collimator lens configured to form a beam of electrons;
• an aperture lens and a condenser lens configured to focus the beam of electrons;
• and
• a downstream blanker configured to remove electrons that are outside of the beam of electrons to form the electron beam;
• a carbon dioxide (CO2) laser configured to generate a laser beam having a sufficient energy to ignite a plasma from the plurality of charged tin droplets within an EUV source vessel, wherein the plasma emits extreme ultraviolet radiation;
• and
• an electromagnetic field generator configured to generate an electric field or a magnetic field that controls a trajectory of the plurality of charged tin droplets.

A method of generating extreme ultraviolet (EUV) radiation, comprising:

• generating a plurality of charged fuel droplets having a net positive or negative electrical charge;
• generating an electric field or a magnetic field configured to stabilize a trajectory of the plurality of charged fuel droplets;
• focusing a laser beam on the plurality of charged fuel droplets to generate extreme ultraviolet (EUV) radiation;
• and
• wherein the electric field or the magnetic field stabilizes the trajectory of the plurality of charged fuel droplets, prior to ignition of the charged fuel droplets, along a path intersecting the laser beam.