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US 2016/0365472 A1Published application
Method of manufacturing solar cell
AssigneeLG Electronics Inc.
InventorsYoungsung YANG, Hyungjin KWON, Chungyi KIM, Junghoon CHOI
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Abstract
Disclosed is a method of manufacturing a solar cell. The method includes forming a protective film using an insulation film over a semiconductor substrate, the semiconductor substrate including a base area of a first conductive type and formed of crystalline silicon. The forming of the protective film includes a heat treatment process performed at a heat treatment temperature of 600 degrees Celsius or more under a gas atmosphere including a halogen gas, which has a halogen element.
Claims20
A method of manufacturing a solar cell, the method comprising:
- forming a protective film using an insulation film over a semiconductor substrate, the semiconductor substrate including a base area of a first conductive type and formed of crystalline silicon,
- wherein the forming of the protective film includes a heat treatment process performed at a heat treatment temperature of 600 degrees Celsius or more under a gas atmosphere including a halogen gas, which has a halogen element.
Dependencies are inferred from the claim text.