Semiconductor fabrication facility data collection system

A fabrication data collection system comprising:

• a semiconductor tool data collection unit comprising:
• a data collector, a semiconductor fabrication tool, an energy monitor, and a fluid flow monitor;
• wherein the semiconductor fabrication tool includes sensors to output tool characteristics, and the tool characteristics output is communicated to the data collector;
• wherein the energy monitor outputs an amount of energy used by the semiconductor fabrication tool, and the energy monitor output is communicated to the data collector;
• wherein the fluid flow monitor outputs a fluid flow rate of the semiconductor fabrication tool, and the fluid flow rate output is communicated to the data collector;
• wherein the semiconductor tool data collection unit is configured to communicate the outputs to one more servers using a network switch, wherein the network switch is configured to receive a communication from one or more semiconductor tool data collection units;
• wherein the servers are configured to store the outputs and/or perform analysis on the one or more communications from the one or more semiconductor tool data collection units, and to connect to a public network through a secure firewall, such that one or more authorized users are remotely able to access information on the servers though the public network via the secure firewall.