Calcium fluoride optical member, manufacturing method therefor, gas-holding container, and light source device
AssigneeNikon Corporation
InventorsNaoyasu UEHARA, Motofusa KAGEYAMA
Life of this patent
Estimating the term…
Abstract
There is provided a calcium fluoride optical member formed from monocrystalline calcium fluoride and having a tubular shape. A {110} crystal plane or a {111} crystal plane of the monocrystalline calcium fluoride is orthogonal to a center axis of the tube.
Claims26
A calcium fluoride optical member formed from monocrystalline calcium fluoride and having a tubular shape,
- wherein a {110} crystal plane or a {111} crystal plane of the monocrystalline calcium fluoride is orthogonal to a center axis of the tube.
A manufacturing method of a calcium fluoride optical member, the method comprising:
- specifying a direction of a {110} crystal lane or a {111} crystal plane of monocrystalline calcium fluoride;
- and
- machining the monociystalline calcium fluoride into a tubular shape,
- wherein the machining is carried out an that a center axis of the tube and the specified direction of the {110} crystal plane or the {111} crystal plane are orthogonal to each other.
A calcium fluoride member formed from monocrystalline calcium fluoride and having a tubular shape,
- wherein an angle at which one of a {110} crystal plane and a {111} crystal plane of the monocrystalline calcium fluoride intersects with a direction in which the tube extends is in a range of 90°±5°.
A calcium fluoride member formed from monocrystalline calcium fluoride and having a tubular shape,
- wherein a {110} crystal plane or a {111} crystal plane of the monocrystalline calcium fluoride and a direction in which the tube extends intersect at an angle of approximately 90°.
Dependencies are inferred from the claim text.