Analyzing energy of charged particles

An analysis device for analyzing the energy of charged particles, comprising:

• at least one optical axis;
• at least one detector for detecting charged particles, wherein the detector has a detection area on which impinge the charged particles which move in a direction of incidence toward the detector;
• and
• at least one opposing field grid device to which a voltage is applied in such a way that a portion of the charged particles is reflected by the opposing field grid device and not detected by the detector, wherein the opposing field grid device has a curvature, and wherein the opposing field grid device is designed to be displaceable along the optical axis.

A particle beam apparatus for analyzing and/or processing an object, comprising:

• at least one beam generator for generating a particle beam comprising charged primary particles;
• at least one objective lens for focusing the particle beam onto the object, wherein interaction particles arise in the event of an interaction of the particle beam with the object, and
• at least one analysis device for analyzing the energy of charged particles in the form of the interaction particles, the analysis device having:
• at least one detector for detecting the charged particles, wherein the detector has a detection area on which impinge the charged particles which move in a direction of incidence toward the detector;
• at least one opposing field grid device to which a voltage is applied in such a way that a portion of the charged particles is reflected by the opposing field grid device and not detected by the detector;
• at least one electrostatic and/or magnetic lens, wherein proceeding from the detector, as viewed in a direction opposite to the direction of incidence of the charged particles, firstly the detector, then the opposing field grid device and then the electrostatic and/or magnetic lens are arranged, wherein the opposing field grid device has a curvature;
• at least one optical axis which extends through the opposing field grid device;
• a center of curvature of the opposing field grid device, wherein the center of curvature is an intersection point of the optical axis with the opposing field grid device, and wherein the curvature has a radius of curvature which is given by the section between the center of curvature and a starting point on the optical axis, wherein the opposing field grid device is curved in the direction of the starting point as viewed from the center of curvature and wherein the analysis device has one of the following features:
• the electrostatic and/or magnetic lens is arranged along the optical axis downstream of the starting point as viewed in the direction of incidence of the charged particles;
• the starting point is arranged along the optical axis between the electrostatic and/or magnetic lens and the center of curvature;
• or
• the starting point is arranged along the optical axis downstream of the electrostatic and/or magnetic lens and downstream of the center of curvature as viewed in the direction of incidence of the charged particles.