Highly homogeneous glass-ceramic component
AssigneeSchott AG
InventorsRalf JEDAMZIK, Steffan GRÜN, Thomas LIFKA, Johann FADERL
Life of this patent
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Abstract
A glass-ceramic component is provided that has a low average coefficient of thermal expansion (CTE) and a high CTE homogeneity. The use of such a component and a process for producing such a component are also provided.
Claims15
A low thermal expansion glass-ceramic component, comprising, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.
An astronomical mirror comprising a low thermal expansion glass-ceramic component, that, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.
An extreme ultraviolet lithography device comprising a low thermal expansion glass-ceramic component, that, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.
Dependencies are inferred from the claim text.