Reversible Top/Bottom MEMS Package
AssigneeAmkor Technology, Inc.
InventorsDavid Bolognia, Bob Shih-Wei Kuo, Bud Troche
Life of this patent
Estimating the term…
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AssigneeAmkor Technology, Inc.
InventorsDavid Bolognia, Bob Shih-Wei Kuo, Bud Troche
Estimating the term…
A semiconductor device has a base substrate having a plurality of metal traces and a plurality of base vias. An opening is formed through the base substrate. At least one die is attached to the first surface of the substrate and positioned over the opening. A cover substrate has a plurality of metal traces. A cavity in the cover substrate forms side wall sections around the cavity. The cover substrate is attached to the base substrate so the at least one die is positioned in the interior of the cavity. Ground planes in the base substrate are coupled to ground planes in the cover substrate to form an RF shield around the at least one die.
1-20. (canceled)
A semiconductor device, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.