Carriage transport system and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorTakeshi YAMAMOTO
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AssigneeCanon Kabushiki Kaisha
InventorTakeshi YAMAMOTO
Estimating the term…
A carriage transport system, including a transport path formed of a plurality of transporting modules; a plurality of lower-order controllers each configured to conduct drive control of a carriage on a covered transporting module among the plurality of transporting modules; and a higher-order controller configured to control the plurality of lower-order controllers, wherein the plurality of lower-order controllers each receive a drive instruction for the carriage on the transport path from the higher-order controller in advance, and when respectively receiving one-group transport instructions transmitted from the higher-order controller simultaneously at the same timing, the plurality of lower-order controllers each apply the drive instruction to one of the carriage that is present on the covered transporting module and the carriage that is to enter the covered transporting module in an order of entering the covered transporting module, to thereby conduct the drive control of the carriage.
A carriage transport system, comprising:
The method of manufacturing an article using a carriage transport system and at least one process apparatus,
Dependencies are inferred from the claim text.