Imprint apparatus, imprint method, and article manufacturing method

An article manufacturing method comprising:

• forming a pattern on an imprint material on a substrate using an imprint apparatus for forming a pattern of an imprint material using a mold, and
• processing the substrate with the pattern being formed,
• wherein the imprint apparatus comprises:
• a driving unit configured to adjust a distance and a relative tilt between the mold and the substrate;
• an image capturing unit configured to capture a plurality of times an interference fringe formed by illuminating the substrate via the mold in a process of enlarging a contact area between the mold and the imprint material by reducing the distance between the mold and the substrate by the driving unit;
• and
• a control unit configured to control the driving unit so as to correct the relative tilt between the mold and the substrate a plurality of times in the process based on images captured by the image capturing unit a plurality of times.