Printed chemical mechanical polishing pad having abrasives therein and system for printing
AssigneeApplied Materials, Inc.
InventorsKasiraman Krishnan, Nag B. Patibandla, Periya Gopalan
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AssigneeApplied Materials, Inc.
InventorsKasiraman Krishnan, Nag B. Patibandla, Periya Gopalan
Estimating the term…
A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.
1-16. (canceled)
A polishing pad, comprising:
(canceled)
An apparatus for fabricating a polishing layer of a polishing pad, comprising:
Dependencies are inferred from the claim text.