3d-printed polishing pad for chemical-mechanical planarization (cmp)
AssigneePresident and Fellows of Harvard College
InventorsJennifer A. Lewis, Brett G. Compton
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Abstract
A 3D printed polishing pad for chemical-mechanical planarization (CMP) comprises a microlattice including a plurality of layers of extruded filaments arranged in a crisscross pattern. The extruded filaments comprise a polymer composite including a thermoset polymer matrix and filler particles dispersed therein, where the filler particles comprise a length or diameter of no greater than about 200 nm. A three-dimensional network of interconnected voids extends through the microlattice.
Claims25
A 3D printed polishing pad for chemical-mechanical planarization, the 3D printed polishing pad comprising:
- a microlattice comprising a plurality of layers of extruded filaments arranged in a crisscross pattern, the extruded filaments comprising a polymer composite including a thermoset polymer matrix and filler particles dispersed therein, wherein the filler particles comprise a linear size of no greater than about 200 nm, and wherein a three-dimensional network of interconnected voids extends through the microlattice.
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14-22. (canceled)
A 3D printable composite ink formulation for printing a polishing pad, the 3D printable composite ink formulation comprising:
- an uncured polymer resin, a latent curing agent, and filler particles comprising a linear size of no more than about 200 nm, and
- wherein the composite ink formulation comprises a strain-rate dependent viscosity and a plateau value of elastic storage modulus G′ of at least about 104 Pa.
28-29. (canceled)
32-33. (canceled)
A method of making a 3D printed microlattice for chemical-mechanical planarization, the method comprising:
- depositing a continuous filament on a substrate in a predetermined pattern layer by layer, the continuous filament comprising a composite ink formulation including an uncured polymer resin, filler particles, and a latent curing agent, wherein the filler particles comprise a length or diameter of no greater than about 200 nm;
- forming a microlattice comprising a plurality of layers of extruded filaments arranged in a crisscross pattern, the extruded filaments being portions of the continuous filament;
- and
- curing the composite ink formulation to form a polymer composite comprising a thermoset polymer matrix and the filler particles dispersed therein.
Dependencies are inferred from the claim text.