Measurement apparatus, system, and method of manufacturing article

A system comprising:

• a measurement apparatus configured to measure an object using pattern light;
• and
• a robot configured to hold and move the object based on a measurement result of the measurement apparatus,
• wherein the measurement apparatus includes:
• a light source having a structure including a light emitting portion for emitting light and a reflecting portion for reflecting light;
• a mask including a pattern region in which transmitting regions for transmitting light and reflecting regions for reflecting light are periodically arranged, and configured to generate the pattern light;
• an optical system arranged between the light source and the mask;
• an imaging unit configured to image the object irradiated with the pattern light;
• and
• a processor configured to obtain the shape of the object based on an image obtained by the imaging unit,
• wherein the light source, the optical system, and the mask are arranged so that light emitted from the light source is incident on the reflecting region of the mask via the optical system, is reflected by the reflecting region to return to the light source via the optical system, and then is reflected by the reflecting portion of the light source to enter the transmitting region of the mask via the optical system.

A method of manufacturing an article, comprising:

• holding and moving, by a robot, a part measured by a measurement apparatus;
• and
• manufacturing the article by performing one of processing and assembling of the moved part,
• wherein the measurement apparatus measures a shape of an object using pattern light, and includes:
• a light source having a structure including a light emitting portion for emitting light and a reflecting portion for reflecting light;
• a mask including a pattern region in which transmitting regions for transmitting light and reflecting regions for reflecting light are periodically arranged, and configured to generate the pattern light;
• an optical system arranged between the light source and the mask;
• an imaging unit configured to image the object irradiated with the pattern light;
• and
• a processor configured to obtain the shape of the object based on an image obtained by the imaging unit,
• wherein the light source, the optical system, and the mask are arranged so that light emitted from the light source is incident on the reflecting region of the mask via the optical system, is reflected by the reflecting region to return to the light source via the optical system, and then is reflected by the reflecting portion of the light source to enter the transmitting region of the mask via the optical system.