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AssigneeBerliner Glas KGaA Herbert Kubatz GmbH & Co.
InventorsRalf HAMMER, Stefan HOESCHELER, Mike FISCHER, Gregor HASPER
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Method of manufacturing holding plate (11) including ceramic material of several chemical elements and configured for holding apparatus (10) for holding a component by electrostatic forces or vacuum, includes the steps of material removal from holding plate (11) by laser ablation, wherein by laser irradiation (1) protrusions (13) are formed on holding plate (11), end faces (13.1) of which span a carrier surface for the component, and surface modification of holding plate (11) by laser irradiation (1), wherein irradiation parameters of laser irradiation (1) are set such that at least one of the chemical elements of the ceramic material is enriched on the surface of holding plate (11). A method is also described of manufacturing holding apparatus (10) for holding a component by electrostatic forces or vacuum, holding plate (11) which is produced with the inventive method, and holding apparatus (10) with at least one holding plate (11).
A method of manufacturing of a holding plate, which comprises a ceramic material of several chemical elements and is configured for a holding apparatus for holding a component by electrostatic forces or vacuum, with the steps of
A holding plate which comprises a ceramic material of several chemical elements and is configured for a holding apparatus for holding a component by electrostatic forces or vacuum, said holding plate comprising a plurality of protrusions, wherein on a surface of the holding plate, at least one of the chemical elements of the ceramic material is enriched in comparison with a distribution of other elements in a volume of the ceramic material.
Dependencies are inferred from the claim text.